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Design and Measurement of Z-tilts Compensating Stage

Hau-Wei Lee, Chien-Hung Liu, Chieh-Li Chen

Abstract


The precision compensating stage is a very important component in the development of nano-measuring machine. This study present a z-tilts compensating stage with a three degree-of-freedom optical measuring system. Three piezoelectric actuators are used to drive the compensating
stage. A circular flexure hinges is placing above each piezoelectric that are applied as a ball joint with high stiffness. The circular flexure hinge is optimum designed by Taguchi methodology. The measuring system is included a laser interferometer, a position-detection-sensor and some
optical components. Angular error of the optical measurement system is about ±0.05 arcsec. The linear and angular resolutions of the compensating stage are 20 nm and 0.1 arcsec, respectively. The observed natural
frequency of the stage is about 510 Hz.

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References


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DOI: http://dx.doi.org/10.21535%2FProICIUS.2007.v3.595

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