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Fabrication of Photolithography Micro-grating pattern for DNA Optical Biosensors

Naphat Chathirat


An optical biosensor device is a grating pattern structure fabricated using a Microelectromechanical system (MEMS), which is a photolithography process technique. This research describes the detection of biomolecular mass on the surface of this sensor device. Biomolecular mass consists of an amine functional group, EDC/NHS, Streptavidin in PBS 7.4, and biotin-ssDNA. When
molecules are attached to the surface of the devicce, the reflected wavelength is shifted due to the change of the optical path of light that is coupled into the grating structure. Therefore, the extent of the peak wavelength shift can be used to determine the amount of bound reagents and analyte. The advantages of this device are that it works with less bio-molecular mass than other methods and can be used at room temperature.

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